ASML Holding NV confirmed its next-generation High-NA extreme ultraviolet (EUV) lithography machines are ready for high-volume manufacturing. A senior executive told Reuters the milestone enables chipmakers like Intel and TSMC to produce more powerful and efficient semiconductors.
Each High-NA tool costs approximately $400 million. These machines are considered essential for the future of artificial intelligence chip production.
Technical data to be released at a conference shows the machines have successfully processed 500,000 silicon wafers. The data also demonstrates limited downtime for the new equipment. This development marks a significant turning point for next-generation semiconductor manufacturing.