Amtech Systems reported third quarter fiscal 2026 net revenue of $22.4 million, a 14.5% increase year-over-year, with GAAP EPS of $0.10. The growth was primarily driven by strong demand in its Thermal Processing Solutions (TPS) segment, fueled by the AI infrastructure build-out, which offset continued weakness in the Semiconductor Fabrication Solutions (SFS) segment.

Key Highlights

  • Net revenue grew 14.5% year-over-year to $22.4 million, led by a 24.9% increase in the Thermal Processing Solutions (TPS) segment to $17.7 million.
  • AI-related revenue surged approximately 120% from the prior year period, highlighting strong demand for advanced packaging equipment.
  • Gross margin expanded to 50.0% from 46.7% in the same quarter last year, attributed to a focus on higher-margin AI-related products.
  • Customer orders rose to $28.8 million, up from $21.1 million in the second quarter, increasing the company's backlog to $28.7 million.