Onto Innovation Inc. has completed its previously announced acquisition of a 27% minority equity stake in Rigaku Holdings Corporation for approximately $720 million. This strategic investment deepens a collaboration aimed at advancing X-ray-based process control solutions for semiconductor manufacturing.
Key Details
- Transaction: Acquired 61,123,436 shares, representing a 27% stake in Rigaku Holdings Corporation.
- Purchase Price: The aggregate purchase price was approximately $720 million.
- Seller & Timeline: The shares were purchased from Atom Investment, L.P., an affiliate of The Carlyle Group, under an agreement dated April 21, 2026. The transaction closed on August 10, 2026.
- Strategic Impact: The investment strengthens the partnership between the companies to develop next-generation semiconductor technologies. Onto Innovation will nominate one director to Rigaku's board.