ASML Holding researchers have developed a method to substantially increase the power of extreme ultraviolet (EUV) light sources in lithography machines. This advancement is expected to raise chip production capacity by up to 50% by the end of the decade.
The technology increases light source power from 600 watts to 1,000 watts. This enhancement allows customers such as TSMC and Intel to process silicon wafers with greater speed and efficiency.
ASML confirmed the system is capable of sustained production rather than serving as a temporary demonstration. The company remains the world's sole manufacturer of EUV machines required for advanced semiconductor manufacturing.