ASML plans to increase prices for its semiconductor manufacturing equipment. The company discussed raising rates for extreme ultraviolet (EUV) lithography machines with its largest customer, TSMC.

ASML intends to charge approximately 10% more for its deep ultraviolet (DUV) systems. No specific price increase for EUV technology has been disclosed.

TSMC has reportedly begun pushing back against the proposed price hikes. The disagreement follows earlier concerns from TSMC regarding the high cost of ASML’s next-generation High-NA EUV machines.