ASML is investigating plans to expand production capacity to over 110 Extreme Ultraviolet (EUV) lithography machines by 2028. The company's CFO cited surging demand from the artificial intelligence sector as the primary driver for the expansion.

ASML previously targeted a capacity of at least 80 systems for 2027. It had also projected a 30% capacity increase for 2028.

Most new orders are now being placed for 2028 delivery. Analysts identify final assembly speed as the primary bottleneck for expansion rather than supply chain constraints.